The STC-2000A from Sycon offers features and performance not previously available in a thin film deposition controller. Its advanced electronics, LCD display, storage for 50 film programs, 9 process recipes and programmable input/output structure give the user versatility and performance. The STC-2000A uses the time-proven 6 MHz oscillating quartz crystal as the sensor device. The STC-2000A is constructed with advanced microprocessor technology. This enables the direct solution of the complex mathematical equation associated with the frequency shift versus mass loading characteristics of the quartz crystal sensor. Its computational power allows the measurement of the material accumulated on the sensor crystal to be accurately converted to film thickness using the exact equation; inaccuracies due to approximations and limited ranges of material constants do not contribute to thickness and rate errors. An innovative frequency measurement system allows the STC-2000A to acquire and display 10 measurements/second with 0.133 Å/s/measurement rate resolution on each of the sensor input channels. The standard STC-2000A is equipped with 8 relays, 8 opto-coupled inputs, an RS-232 computer interface, and high-resolution analog control and recorder outputs. A rack mount for half-rack mounting is also standard.
