Mass Flow Controllers and Mass Flow Meters

• 180 Low Cost 5 sccm to 30 slm ranges (PDF)
• 8100 General Purpose 3 sccm to 30 slm ranges (PDF)
• 7300 General Purpose 5 sccm to 30 slm ranges (PDF)
• 7360 All-Metal 5 sccm to 30 slm ranges (PDF)
• TN260 General Purpose 10 sccm to 200 slm ranges (PDF)
• 1660 All-Metal 3 sccm to 30 slm ranges (PDF)
• TN2900 General Purpose or All-Metal
  10 sccm to 30 slm ranges (PDF)
• TN2920 General Purpose 30 slm to 200 slm ranges (PDF)
• TN2925 General Purpose 200 slm to 1000 slm ranges (PDF)
• 8160 High-Purity All-Metal 3 sccm to 30 slm ranges (PDF)
• 3000 All-Metal 30 slm to 200 slm ranges (PDF)