The Octiv™ Single Frequency VI Probe measures the Voltage, Current, Phase, Harmonics, Real Power, Forward Power and Reflected Power of a plasma chamber RF source. Octiv™ is a single frequency, inline RF VI Probe. The probe contains an RF VI sensor and high speed data acquisition system, utilising an ultra high-speed digital Fourier Transform for high accuracy measurement of fundamental RF voltage, current and phase.
The Octiv™ probe is housed in a single, compact enclosure, and is easily installed on all high power RF equipment encountered in the laboratory or industrial environment. A USB connection provides power and data access to the sensor. An adaptor kit can be supplied with the probe to enable connection with standard RF equipment.
Measure:
- Voltage, Current, Phase
- Real, Forward, Reflected Power
- Impedance
- Harmonic Components
