The Semion™ Retarding Field Energy Analyzer System is designed to measure both the Ion Energy and Ion Flux at a biased surface in a plasma chamber.
The Semion™ System consists of a Retarding Field Energy Analyzer (RFEA) multi-grid Probe, chamber feed-through assembly, and electronic control unit.
Impedans employs a range of 3-grid and 4-grid retarding field analyzers to provide industry leading ion energy distribution and ion flux measurements.
The RFEA Probe can be mounted on an electrode/substrate holder, or in a dummy wafer to sample wafer processing conditions.
The Semion™ System is suitable for installation on a wide range of plasma source configurations; capacitively coupled, inductively coupled, magnetron, pulsed bias, cascaded arc, and remote source.
