Power Supplies
CCR Process Products is the Canadian distributor for products manufactured by MKS Instruments. This product range includes thermal Mass Flow Controllers (MFC) and Mass Flow Meters (MFM), Baratron capacitance manometers, RF and DC Power Supplies, Throttle Valves and Pressure Controllers for vacuum systems, Residual Gas Analyzers (RGA), FTIR Gas Analyzers, Ozone Gas Generators, Vacuum Gauges, Fittings and Valves, I/O Control Devices and Gateways, and Helium Leak Detectors.
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elite™ RF Plasma Generators - MKS
Product Number: elite
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OPT-50 5kW DC Plasma Generator - MKS
Product Number: OPT-50
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OPT-100 10kW DC Plasma Generator - MKS
Product Number: OPT-100
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OPT-200 20 kW DC Plasma Generator - MKS
Product Number: OPT-200
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OPT-400 40kW DC Plasma Generator - MKS
Product Number: OPT-400
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OPT-600 60kW DC Plasma Generator - MKS
Product Number: OPT-600
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Spectrum RF Plasma Generator - MKS
Product Number: Spectrum
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GHW Series High Reliability RF Plasma Generators - MKS
Product Number: GHW Series
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NOVA Series Mid-frequency RF Plasma Generators - MKS
Product Number: NOVA Series
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RPG-200 20kW Pulsed DC Plasma Generator - MKS
Product Number: RPG-200
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Spectrum 2 MHz 5.0 kW and 11.0 kW RF Plasma Generators - MKS
Product Number: Spectrum 2
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QL10513 SurePower 13.0kW and 3.5kW, 13.56 MHz RF Generators - MKS
Product Number: QL10513









