As semiconductor devices become smaller and smaller in size and higher and higher in density, conventional batch type heat treatment is being replaced by wafer-to-wafer treatment. ULVAC-RIKO, specialist in thermal instrumentation, has commercialized RTA series of wafer-to-wafer infrared lamp heating systems by taking full advantage of its high speed heating techniques for the infrared gold image furnace acquired over the past years. The RTA series covers a complete range from 2 inches diameter to 300mm diameter and from silicon to compounds to meet a wide variety of requirements.
