P9B Mass Flow Controller – MKS

P9B Pressure-insensitive, Multi-gas/Multi-range Mass Flow Controller

The P9B pressure insensitive, multi-gas/multi-range mass flow controller features sub-750 millisecond control times and accuracy to within 1% of setpoint over a broad range of process gases, from “light” gases such as helium to “heavy” gases like SF6. P9B is a true multi-range/multi-gas MFC, minimizing MFC inventory requirements.

Using the P9B multi-gas/multi-range capability is made simple with embedded software and standard Ethernet interface that requires only a standard web browser and a PC. Critical gas parameters for most of the gases in use today by the semiconductor industry are already stored on the device – configuring is simply a matter of selecting the gas and specifying the range. The user interface also performs device monitoring & diagnostics during operation.

Contact CCR Process Products for help in establishing the configuration to suit your specific application.