The MKS Instruments 142A Absolute Ambient Pressure/Vacuum Switch offers fast, accurate, and reliable protection for vacuum equipment and processes. The 142 is a heated (100°C) manometer designed to help minimize process effluent buildup that can occur in LPCVD nitride, aluminum etch, and other types of processes. The 142A has relay outputs that are easily interfaced with alarms, valve actuators, computers, process controllers, and other protection devices.
Features & Benefits:
- Heated to minimize process effluent buildup
- Fully adjustable set point for flexibility
- All-metal, all-welded construction exposes only Inconel® and stainless steel for corrosion resistance
- Fast response switching - 20 msec
