The MKS Instruments 1479A Mass-Flo® Metal-Sealed Mass Flow Controller (MFC) is a robust, metal-sealed mass flow controller designed to measure and control the flow of gases in high purity applications. The 1479 can also be used as a pressure controller when connected to a suitable pressure transducer.
The 1479A Mass-Flo® Metal-Sealed Mass Flow Controller is a direct form-fit-function replacement for the most common MFCs on the market today. It is available in both analog and digital models with accuracies of 1% of Full Scale and 1% of Reading, respectively.