The all-digital MKS ALTA Mass Flow Controller (MFC) includes technology improvements in functionality and performance to help users in semiconductor and high purity thin-film applications increase tool throughput and reduce overall system costs. To increase overall system throughput, the ALTA MFC features fast gas settling times to meet the productivity demands of next generation process tools. To facilitate better chamber matching, the ALTA features improved accuracy to 1% of set point.
Cost savings to users are seen through several innovative enhancements. To reduce the number of MFCs in inventory, users can recall specific MFC gas calibrations and flow ranges from up to 20 stored gas tables, configuring the ALTA MFC right off the shelf. The ALTA represents MKS’ ongoing dedication to helping customers increase productivity while reducing system costs.
