The MKS Instruments 2179A Mass-Flo® General Purpose Mass Flow Controller is an elastomer-sealed mass flow controller with an integral shut-off valve, designed to measure and control the flow of gases in a wide variety of applications. It can also be used as a pressure controller when connected to a suitable pressure transducer.
The normally closed shut-off valve provides positive shut-off to 4 x 10-9 scc/sec He. It is available in both analog and digital models with accuracies of 1% of Full Scale and 1% of Reading, respectively.
Power required for the 2179A Mass-Flo® General Purpose Mass Flow Controller is minimal: the nominal ±15 VDC unit consumes only 100 mA during operation (200 mA at initial turn-on).
