The MKS Type 1579 is a digital mass flow controller of the latest generation developed for a multitude of applications in research and industry. The 1579 is based on proven MKS technology and offers a fast controller settling time as well as high accuracy in the entire control range. For example, this makes it possible to integrate the 1579 into fast cycle processes in which the idle time for the stabilization of the process conditions has to be minimal and reproducible.
Due to its compact design, the 1579 allows space-saving designs of gas supply systems. The electrical connection is provided via Sub-D-connectors for both analog and Profibus variants in conformance with all CE regulations. Whereas in R&D mass flow controllers are mainly used in conjunction with power supply and readout units developed by MKS especially for this purpose, OEMs in industry focus increasingly on digital, bus-compatible components.
Features & Benefits
- Full Scale Flow Ranges from 50 slm to 300 slm
- Multiple Supply Voltages 24 VDC and ±15 VDC
- Controller Settling Time of less than 1 second
- Available with analog and Profibus DP interface
- Storage of up to 15 Gas Tables (Multigas/Multirange)
- Plug-compatible with earlier MKS MFC's
- Compact design
- Analog Interface Version comes with a diagnostics port
- CE Mark compliant
