The MKS Instruments 647C Four/Eight-channel Mass Flow and Pressure Programmer/Display is a full-rack, multichannel controller which provides both pressure and flow control. Up to eight gas mass flow channels and one pressure channel allow for independent or ratio-based gas flow control. The one pressure channel and up to four flow channels are displayed simultaneously on an LCD readout, and are controlled locally from the front panel or remotely using the analog RS-232 interface.
