The HPQ2 and HPQ2S represent the latest in high pressure, pump free, process RGA technology. The analyzer is extremely compact with an insertion length of less than 1.0" into the process chamber, and the RGA electronics are housed in a compact control module, which mounts directly onto the analyzer. This configuration is particularly attractive in applications where space is at a premium, such as clean room areas in "semiconductor fabs".
With their ability to monitor at the pressures encountered in the degas, pre-clean , buffer and transfer chambers on semiconductor process tools, HPQ2 and HPQ2S are able to gather vital information throughout a process which can be used to speed-up PM recovery and improve yield. HPQ2 and HPQ2S use Process Eye Professional, a recipe driven, advanced software package, with an optional SECS II interface which integrates and automates the operation of the analyzers on the process tool.
For less demanding RGA applications at higher pressures, the HPQ2 or HPQ2S are ideal because they do not require a support pumping package.
