The MultiGas™ Purity Analyzer is an FTIR Spectrometry based gas analyzer capable of ppb contaminant detection in high purity bulk process gases such as NH3 (Ammonia), NF3, SiF4, and H2. The MultiGas™ Purity Analyzer is composed of a process FTIR Spectrometer, high-optical-throughput internally polished sampling cell, and applications-specific gas analysis software. These integrated components, along with automated bake-out functionality, provide unmatched precision and accuracy for bulk gas contaminant monitoring.
Features & Benefits:
- Real-time, on-line purity analysis of bulk process gas,
- Trace ppb level impurity detection in bulk process gases such as NH3, NF3, SiF4, and H2,
- Gas cell constructed to handle high purity corrosive gases,
- Specialized automatic zeroing and self-calibration software.
