The MKS SEMOZON® AX8575 stand-alone ozone gas delivery system is designed to provide high flow, high concentration, ultra-clean ozone generation and delivery. This unit has the highest flexibility to meet the ever changing needs of the semiconductor industry. The SEMOZON AX8575 is a fully integrated, high output ozone gas delivery system specifically designed for use with an increasing number of semiconductor process applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth. The system can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. The SEMOZON AX8575 has the highest flexibility with an in-rack chiller option for ultra high concentrations. Flow rates of up to 40 slm and concentrations up to 350g/Nm3 can be achieved depending on the configuration of the system.
