The MKS, ASTeX® Products LIQUOZON® family of high performance, ultra clean dissolved ozone delivery systems provides high purity, dissolved ozone in concentrations ranging from 5 to 90 ppm at flows from 5 to 60 liters per minute. Typical dissolved ozone applications include wet wafer cleaning, photoresist strip, contaminant removal, surface conditioning and oxide growth.
Ozone is an environmentally friendly alternative to many process chemicals in the semiconductor industry. It has a high redox potential, can be generated at the point-of-use and is easily converted back to oxygen. Cost of purchase, storage and disposal of many chemicals can thus be reduced considerably.
