SmartPower® AX2500 Series intelligent microwave power generators are built on MKS, ASTeX Products’ experience in designing rugged, reliable microwave power generators for demanding semiconductor fabrication and industrial applications. The compact AX2500 design architecture incorporates MKS field-proven technology, and combines new design features aimed at improved performance and lower cost of ownership.
The SmartPower AX2500 Series consists of three models which cover a spectrum of continuous microwave power from 180W to 6kW. The AX2518 has maximum performance of 1.8kW, the AX2530 3kW, and the AX2560 6kW. Frequency output is 2.455GHz ±15 MHz.
