T3Bi High Speed Exhaust Throttle Valve - MKS

The T3BIA and T3BiB (RoHS compliant) Intelligent Exhaust Throttle Valve is specifically designed for applications where a simple pressure control system is desired. The T3BI throttling valve integrates all control, communication, and driver circuits within a Throttle Valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The throttle valve self-tuning control algorithm and high speed operation drives the system to set point fast and with minimum overshoot, and ensures repeatable process recipes without operator involvement.

Features and Benefits:

  • Compact pressure control system throttle valve with integrated on-board controller electronics
    • Easy integration, no need for additional cables or rack space
  • High Speed (<200 msec. open to close)
    • Allows quicker time to set point and faster recovery from flow and pressure perturbations
    • Enables high tool throughput
  • High torque
    • Extends uptime in harsh process conditions
  • Dual channel Baratron® capacitance manometer input with range auto switching
    • Supports wide dynamic pressure control range
    • Allows for high pressure control accuracy
  • Available with multiple communications protocols: Analog/RS232/DeviceNet
  • Programmable for pressure, position, or set point limits
  • Advanced self-tuning control algorithm
    • Minimizes time to setpoint
    • Ensures repeatable process recipes without operator involvement
  • Encoder based actual position verification
  • Available in low conductance versions
    • Suitable for "house exhaust" or atmospheric throttle valve applications
  • Provides power for connected Baratron® Capacitance Manometers (optional)
  • Heatable (105°C standard, 150°C optional)

 

Product Number: T3BiA

T3Bi High Speed Exhaust Throttle Valve - MKS

Double click on above image to view full picture

Zoom Out
Zoom In

More Views