Rapid Thermal Processing (RTP) has become an important heating technique for annealing semiconductors, ferroelectrics and other thin film devices. But until recently, only large and expensive production systems were available for this rapid heating/cooling technique, making R&D work difficult to accomplish, especially on small samples. To address this need, ULVAC-RIKO has developed the MILA-SOOO Mini Lamp Annealer. This compact table top RTP system is built around gold reflector IR furnace and contains a high precision temperature controller. When equipped with optional pumping and gas inlet equipment the MILA-SOOO is able to provide the same performance as larger production scale RTP units on small samples at a fraction of the size and cost.
