With a wide measurement range of 10-3 to 10+3 Torr, the HPS® Series 947 Convection-Enhanced Pirani Controller is ideal for rough to medium vacuum applications. This includes measurement of roughing and foreline pressures, activation of high vacuum sensors, or start-up of a system process with the standard relay set points. The Series 947 Controller is not only suitable for all vacuum industrial applications such as semiconductor or food processing, but also analytical applications and research. It is useful as either a small system controller or as a module in more sophisticated pressure control environments.
