GE50A Mass Flow Controller – MKS

GE50A Elastomer-sealed, Digital Mass Flow Controller

The GE50A digitally-controlled mass flow controller is available with either RS485 or DeviceNet I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of setpoint accuracy on the calibration gas. I/O protocols are designed to allow the GE50A to easily replace RS485 and DeviceNet versions of the MKS 1179A MFC with minor coding.

Contact CCR Process Products for help in establishing the configuration to suit your specific application.