1152C Mass Flow Controller – MKS
1152C Heated Pressure-Based Mass Flow Controller Using Viscous Flow Through a Laminar Flow Tube
The MKS Instruments 1152C Vapor Source MFC is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.
The 1152C Heated Pressure-Based Mass Flow Controller Using Viscous Flow Through a Laminar Flow Tube is capable of delivering vaporized liquid source materials such as: TEOS, DADBS, HMDS, TMCTS, TEAL, TEB, TEG, TEI, TMAL, TMB, TMG, TMI, TaCl5, DMEAA, Ti[OCH(CH3)2]4, TiCl4, TIBAL, and TMP.
The 1152C is available in Canada from CCR Process Products.
