HFV High Flow, High Conductance Vacuum Isolation Valves – MKS

HFVs (High Flow Valves) are high conductance vacuum valves designed for high performance where reliable isolation is needed. The HFVs have a smaller profile, and are lighter, lower in cost, and easier to maintain than similar valves on the market. Produced using the latest manufacturing techniques and highest quality materials, the HFVs are extremely durable and dependable. Lifetime can extend to 1,000,000 cycles for all sizes, greatly increasing system uptime. An edge welded stainless steel bellows prevents out-gassing and virtual leaks. The bellows stroke length is optimized to assure maximum cycle life while maintaining a high conductance. The HFV valves are designed to be easily and completely disassembled in the field, lowering the cost of replacing parts.