T3Bi High Speed Exhaust Throttle Valve – MKS

The T3BIA and T3BiB (RoHS compliant) Intelligent Exhaust Throttle Valve is specifically designed for applications where a simple pressure control system is desired. The T3BI throttling valve integrates all control, communication, and driver circuits within a Throttle Valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The throttle valve self-tuning control algorithm and high speed operation drives the system to set point fast and with minimum overshoot, and ensures repeatable process recipes without operator involvement.