835 VQM DPS – MKS
835 VQM DPS Vacuum Quality Monitor
The VQM is the world’s fastest, lowest power, gas compositional analysis instrument with full data collection, spectral deconvolution, and data logging at 85 ms capture rates over the full 1-145 amu measurement range. Optionally, the VQM can monitor a full 1-300 amu at 120 ms rates.
With differential pump system to extend operation up to 3 Torr.
Available in Canada from CCR Process Products.