IM100A Mass Flow Controller – MKS

IM100A Multi-gas, Multi-range Metal-sealed Mass Flow Controller for Industrial Environments

The IM100A is a digitally-controlled MFC offered with analog (0 to 5 VDC or 4-20 mA) or Profibus®. The digital control electronics utilize the latest in MKS control algorithms for fast and repeatable response to setpoint throughout the control range. Typical response times are on the order of 500 milliseconds. A digital calibration (included) yields 1% of setpoint accuracy on the calibration gas.

Obsolete, contact CCR for other options.