2032 FTIR – MKS
2032 Purity MultiGas™ FTIR Gas Analyzer
The MultiGas™ Purity Analyzer is an FTIR Spectrometry based gas analyzer capable of ppb contaminant detection in high purity bulk process gases such as NH3 (Ammonia), NF3, SiF4, and H2. The MultiGas™ Purity Analyzer is composed of a process FTIR Spectrometer, high-optical-throughput internally polished sampling cell, and applications-specific gas analysis software. These integrated components, along with automated bake-out functionality, provide unmatched precision and accuracy for bulk gas contaminant monitoring.
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