elite™ RF Plasma Generators – MKS

elite™ RF plasma generators provide state-of-the art technology in a compact air-cooled package. Each elite™ RF Power Supply is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. Its design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available.

Features & Benefits:

• Air cooled for lower facilities cost – does not require connection to factory cooling loop
• High efficiency design, DC to RF efficiency of >85% for low power consumption
• Compact half rack enclosure enables direct tool mounting
• Integrated single board design eliminates cables and connectors