OPT-200 DC Plasma Generator – MKS

OPT-200 20 kW DC Plasma Generator

Today’s advanced sputtering processes require speed, control, accuracy, improved reliability and sophisticated arc management. Building on the production-proven DCG series, the Optima® is the next generation of MKS high performance DC Plasma power supply systems for Physical Vapor Deposition (PVD) processes.

The design is compact and scalable, enabling power levels from 20kW to 100kW. The higher powers are attained by linking 20kW slave units to a 20kW master. Process reliability and performance are provided by a variety of output regulation modes, useradjustable settings and control options.

This product is obsolete and there are no planned replacements from MKS.