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OPT-50 DC Plasma Generator – MKS

OPT-50 5kW DC Plasma Generator

The Optima® is the next generation of MKS high performance DC Plasma power supply systems for Physical Vapor Deposition (PVD) processes.

Process reliability and performance are provided by a variety of output regulation modes, user-adjustable settings and control options. Various impedance ranges are possible. MKS Optima® DC generators meet the demanding power requirements for a variety of thin film applications including; semiconductor, data storage, solar cell and industrial coatings.

This product is obsolete and there are no planned replacements from MKS.

Product Number: OPT-50

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