Out of Stock
OPT-50 DC Plasma Generator – MKS
OPT-50 5kW DC Plasma Generator
The Optima® is the next generation of MKS high performance DC Plasma power supply systems for Physical Vapor Deposition (PVD) processes.
Process reliability and performance are provided by a variety of output regulation modes, user-adjustable settings and control options. Various impedance ranges are possible. MKS Optima® DC generators meet the demanding power requirements for a variety of thin film applications including; semiconductor, data storage, solar cell and industrial coatings.
This product is obsolete and there are no planned replacements from MKS.