RPDG-100 DC Plasma Generator – MKS

RPDG-100 10kW Pulsed DC Plasma Generator

RPDG-100 is a 10,000W Asymmetric Bipolar Pulsed DC generator that enables deposition of a wide variety of low defect films including Al2O3, BST, PZT, Ta2O5, TaN, TiN, ITO, SiO2, ZnO and SiN.

This product is obsolete and there are no planned replacements from MKS.