640B Absolute Pressure Controller – MKS
The MKS Instruments 640 Absolute Pressure Controller is a self-contained compact, closed-loop electronic control system used for upstream or downstream pressure control. It contains a Baratron® Capacitance Manometer, normally-closed proportioning control valve, and closed-loop control electronics.
Electrically similar to a standard MFC, the 640 is powered by ±15 VDC at only 200 mA, permitting use with standard power supply/display electronics. The pressure output and input control signals are linear 0-5 or 0-10 VDC, user-selectable. Two trip points are included in the 640, with LED status indicators, for use as simple on/off process limits.
The 640B is RoHS-compliant.
Features & Benefits:
- Integrated Baratron® manometer for accuracy, reliability, and wide range
- Full Scale ranges as low as 10 Torr for low pressure processes
- Upstream or downstream applications