649B Compact Pressure Controller – MKS

The 649 Pressure Controller is a single instrument that provides both pressure control and flow metering, replacing multiple component subassemblies. The 649 Pressure Controller compact design allows for significant reduction in BWCS (backside wafer cooling systems) size and complexity.

649B is RoHS-compliant.

Features & Benefits:

  • Designed For The Most Demanding Processes
  • Reliable, Rugged, Repeatable
  • Easily Integrated