T3Bi High Speed Exhaust Throttle Valve (RoHS) – MKS

The T3BIA and T3BiB (RoHS compliant) Intelligent Exhaust Throttle Valve is specifically designed for applications where a simple pressure control system is desired. The T3BI throttling valve integrates all control, communication, and driver circuits within a Throttle Valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The throttle valve self-tuning control algorithm and high speed operation drives the system to set point fast and with minimum overshoot, and ensures repeatable process recipes without operator involvement.

Obsolete, contact CCR for other options.