354 Vacuum Gauge – MKS

354 Micro-Ion® Module (1×10-9 to 5×10-2 Torr)

The MKS, Granville-Phillips® 354 Micro-Ion® Vacuum Gauge Module combines the world’s smallest ionization vacuum gauge with the control electronics to create a compact, convenient, reliable, and cost-saving solution for many high vacuum applications. The 354 Micro-Ion® Vacuum Gauge Module includes many features that provide for more accurate and repeatable measurement than traditional Bayard-Alpert gauges from 5 x 10-2 Torr to 10-9 Torr. The 354 Micro-Ion® Vacuum Gauge Module all-metal package provides a rugged enclosure and a high level of immunity to electrical noise. High performance in a small volume is achieved though a number of enhancements including a patented dual ion collector design that optimizes electron motion and ion collection.